Semi-Conductor Manufacturing
We build products and systems used in a variety of semiconductor applications. Many products are OEM systems or used in OEM systems sold by other companies as part of their product line. This started with matching networks and expanded into RF generators used in sputtering, etch and deposition phases of semiconductor manufacturing.
Bio/Medical
Some of our plasma systems are used in DNA sequencing labs to help uncover mechanisms of complex diseases and genetic variants, and in research labs around the world that are performing advanced medical research in the fields of cancer, viruses, and other critical human health issues.
Unpackaging (Depackaging) and Etching
To achieve a uniform etching process, there are several vital requirements: electron temperature, control of the ion density, and plasma potential. Our systems will expertly perform: plasma polymerization, plasma ashing, desmearing, descumming, surface treatment, and controlled unpackaging – while lessening plasma damage.
Meterology and Failure Analysis
Advanced Ion Sources for Research
Development of high density Inductively Coupled Plasma (ICP) ion sources has led to commercialization of several designs used in a variety of industries. Appropriate control systems (like the Process Control Module (add a link?)) were required, developed and turned into products as part of this effort. Inquire for more details on these products.
Meterology
As part of our manufacturing needs, we developed automatic testing methods for our internal products. While working with a pharmaceutical manufacturer who needed high speed matching networks for a manufacturing process, the issue of testing them came up. Our internal automatic RF test system design was duplicated and tailored to their application, allowing them to verify and service their equipment in-house. This grew when semiconductor manufacturers found they could obtain a similar system for testing RF gear from manufacturing equipment in-house. This reduced repair times and costs and improved accuracy. Added fixturing and software improvements for additional tests are also facilitated with a flexible hardware design and a robust operating configuration and multiple systems at different facilities enables company-wide RF sub-system and component metrology across multiple locations.
