RF Match

The FastMatch integral sensor design has an extremely wide capture range and rather than sensing

phase error with a diode detector (normally requiring preset tune points), our FastMatch measures

the RF phase difference signal providing a directional error signal to drive the match in the proper

direction yielding a very fast servo control loop. It is more accurate, responds faster and has less

overshoot than the system it replaces. Results? Less time to ignite and tune the plasma and less

variability from wafer to wafer.

The FastMatch microprocessor controls the capacitor positioning motors with pulse width modulation

using the optimum tuning speed to move the capacitors to the correct tune point. It is also programmed

to self-test at power-up, then record operational status and any errors for approximately 100 days of

continuous operation at 500 samples per second. The recorded data from the KTS matchwork may be

uploaded for review via the match’s serial port. Your daily RF operations can now be monitored

and tracked with any anomalies noted for better batch control and improved PM’s.

Our compact package has many more features and fewer interconnects than many competing matches.

With the entire sensor and control system in the enclosure, we reduce RF leakage, eliminate the

cabling and trouble prone external circuit boards of the other designs. Maintenance is easy!

We have a quick build cycle and outrageous service, so contact us today to get your automatic

impedance matching solution on its way.